Inductively coupled plasma 821877 218413954 2008-06-10T15:21:41Z 81.179.51.164 /* External links */ {{otheruses|ICP}} [[Image:ICP-small.jpg|right|thumb|Picture of an analytical ICP viewed through green [[welder]]'s glass]] An '''inductively coupled plasma''' ('''ICP''') is a type of [[plasma (physics)|plasma]] source in which the [[energy]] is supplied by [[electrical current]]s which are produced by [[electromagnetic induction]], that is, by time-varying [[magnetic field]]s.<ref>A. Montaser and D. W. Golightly, eds. Inductively Coupled Plasmas in Analytical Atomic Spectrometry, VCH Publishers, Inc., New York, 1992. </ref> ==Operation== There are two types of ICP geometries: planar and cylindrical. In planar geometry, the electrode is a coil of flat metal wound like a spiral. In cylindrical geometry, it is like a [[helix|helical]] spring. When a time-varying electric current is passed through the coil, it creates a time varying magnetic field around it, which in turn induces [[azimuthal]] electric currents in the rarefied gas, leading to break down and formation of a plasma. Argon is one example of a commonly used rarefied gas. Plasma temperatures can range between 6 000 K and 10 000 K, comparable to the surface of the sun. ICP discharges are of relatively high electron density, on the order of 10<sup>15</sup> cm<sup>-3</sup>. As a result, ICP discharges have wide applications where a high density plasma is necessary. Another benefit of ICP discharges is that they are relatively free of contamination because the electrodes are completely outside the reaction chamber. In a [[capacitively coupled plasma]] (CCP), in contrast, the electrodes are often placed inside the reactor and are thus exposed to the plasma and subsequent reactive chemical species. == Applications == * [[ICP-AES]], a type of atomic [[emission spectrometry]] * [[ICP-MS]], a type of [[mass spectrometry]]. * [[ICP-RIE]], a type of [[reactive ion etching]]. ==See also== *[[Pulsed inductive thruster]] == References == {{reflist}} == External links == * [http://www.cee.vt.edu/ewr/environmental/teach/smprimer/icp/icp.html Inductively Coupled Plasma by Traci Bradford and M. Nicole Cook] * [http://www.jobinyvon.com/Emission/Principle '''Principle of Atomic Emission'''] [[Category:Electrodynamics]] [[category:Spectroscopy]] [[category:Ion source]] [[category:Plasma physics]] [[de:Atomspektroskopie#ICP-OES_.28Optische_Emission.29]] [[fr:Torche à plasma (chimie)]] [[ja:誘導結合プラズマ]] [[nl:Inductief gekoppeld plasma]] [[pt:Espectrometria de Plasma ICP]] [[ru:Индуктивно-связанная плазма]]